Select Publications
Preprints
, 2026, A resonant-cavity-coupled MEMS PZT cantilever for weak acoustic pressure detection, http://dx.doi.org/10.2139/ssrn.6968085
, Low Thermal Budget Electrically Active Thick Polysilicon for Post CMOS MEMS-Last Integration, http://dx.doi.org/10.21203/rs.3.rs-3556585/v1