Select Publications

Conference Papers

Chen SH; Michael A; Kwok CY, 2019, 'A Novel High Performance Piezoelectrically Driven Microlens Actuator for Micro-Optics Applications', in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, pp. 1487 - 1490, http://dx.doi.org/10.1109/TRANSDUCERS.2019.8808811

Chaung I; Michael A; Kwok CY, 2019, 'Study and Application of In-Situ Phosphorus Doped Thick Polysilicon Films at Low Temperature for Post CMOS-MEMS Integration', in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 299 - 302, http://dx.doi.org/10.1109/MEMSYS.2019.8870724

Michael A; Sengupta D; Kwok CY; Kottapalli AGP; Miao J, 2018, 'OptimizedPolyvinylideneFluorideNanofiberWebsforFlexible EnergyHarvesters', Graz, Austria, pp. 857 - 857, presented at Eurosensors, Graz, Austria, 09 September 2018 - 12 September 2018, http://dx.doi.org/10.3390/proceedings2130857

Chen S-H; Michael A; Kwok C, 2018, 'A Fast Response MEMS Piezoelectric Microlens Actuator with Large Stroke and Low Driving Voltage', in NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Singapore, Singapore, pp. 199 - 203, presented at 2018 IEEE 13th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), Singapore, Singapore, 22 April 2018 - 26 April 2018, http://dx.doi.org/10.1109/NEMS.2018.8556979

Sengupta D; Prakash Kottapalli AG; Chen S-H; Michael A; Kwok C; Miao J; Triantafyllou MS, 2018, 'Flexible Graphitized Polyacrylonitrile Nanofiber Bundles for Strain Sensors', in NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Singapore, Singapore, pp. 615 - 618, presented at 2018 IEEE 13th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), Singapore, Singapore, 22 April 2018 - 26 April 2018, http://dx.doi.org/10.1109/NEMS.2018.8556930

Chuang I; Michael A; Soeriyadi A; Kwok CY, 2018, 'In-situ phosphorus doped ultra-high vacuum e-beam evaporated silicon for high gauge factor polysilicon', in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Belfast, UK, pp. 1040 - 1043, presented at 2018 IEEE Micro Electro Mechanical Systems (MEMS), Belfast, UK, 21 January 2018 - 25 January 2018, http://dx.doi.org/10.1109/MEMSYS.2018.8346737

Sengupta D; Kottapalli AGP; Miao J; Kwok CY, 2017, 'Electrospun polyvinylidene fluoride nanofiber mats for self-powered sensors', in Proceedings of IEEE Sensors, Glasgow, UK, pp. 1 - 3, presented at 2017 IEEE SENSORS, Glasgow, UK, 29 October 2017 - 01 November 2017, http://dx.doi.org/10.1109/ICSENS.2017.8233936

Michael AW, 2017, 'High Gauge Factor Piezoresistors Using Aluminium Induced Crystallisation of Silicon at Low Thermal Budget', in Proceedings, Eurosensors, France, Paris, presented at Eurosensors, France, Paris, 03 September 2017 - 06 September 2017, http://dx.doi.org/10.3390/proceedings1040354

Michael AW; Chen S-H; Wang P; Chuang I; Kwok CY; Liu A, 2017, 'Fabrication of Bimorph PZT Micro-Actuators with Passive Polysilicon Structure', in Fabrication of Bimorph PZT Micro-Actuators with Passive Polysilicon Structure, The 7th International Multidisciplinary Conference on Optofluidics 2017, Singapore, presented at The 7th International Multidisciplinary Conference on Optofluidics 2017, Singapore, 25 July 2017 - 28 July 2017, http://dx.doi.org/10.3390/optofluidics2017-04225

Michael AW; Wang P; Chen SH; Chuang I; Kwok CY, 2017, 'Fabrication of nano-scale high aspect ratio ultra sharp tips for nano-mechanical structures at low thermal budget', in TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems, Kaohsiung, pp. 1328 - 1331, presented at Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2017 19th International Conference on, Kaohsiung, 18 June 2017 - 22 June 2017, http://dx.doi.org/10.1109/TRANSDUCERS.2017.7994301

Michael A, 2015, 'Design, fabrication, and characterisation of interdigitated piezo-electric actuation mechanism for mixing-optics', in 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015, Anchorage, pp. 2101 - 2104, presented at Solid-state sensors, actuators and Microsystems, Anchorage, 21 June 2015 - 25 June 2015, http://dx.doi.org/10.1109/TRANSDUCERS.2015.7181372

Chen SH; Michael A; Kwok CY; Wang P, 2015, 'Design and simulation of piezoelectric PZT micro-actuators with integrated piezoresistive displacement sensors for micro-optics applications', in Proceedings of SPIE - The International Society for Optical Engineering, http://dx.doi.org/10.1117/12.2202502

Wang P; Michael A; Kwok CY; Chen SH, 2015, 'Misalignment tolerant efficient inverse taper coupler for silicon waveguide', in Proceedings of SPIE - The International Society for Optical Engineering, http://dx.doi.org/10.1117/12.2202494

Micahel A; Al Hafiz MA; Kwok CY, 2014, 'Effect of front face angle on the performance of planar GRIN silica micro-lens', in 7th Asia-Pacific Conf. on Transducers and Micro/Nano Technologies(APCOT),Daegu, Korea, 29 Jun - 2 Jul 2014

Michael A; Kwok CY, 2013, 'LOW THERMAL BUDGET LOW STRESS THICK POLYSILICON FILMS FOR MEMS USING ULTRA-HIGH VACUUM E-BEAM EVAPORATION', in 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, Spain, pp. 1938 - 1941, presented at Transducers, Spain, 16 June 2013 - 20 June 2013, http://dx.doi.org/10.1109/Transducers.2013.6627173

Xu Y; Michael AW; Kwok CY; Peng G, 2010, 'Detail study on the rear 45° micromirror smoothness on (100) Si substrates', in Procedia Engineering, Elsevier BV, Netherlands, pp. 858 - 861, presented at 24th Eurosensors Conference, Linz, 05 September 2010 - 08 September 2010, http://dx.doi.org/10.1016/j.proeng.2010.09.244

Michael AW; Lou L; Kwok CY, 2010, 'A Novel Piezoelectric Actuation Mechanism', in A Novel Piezoelectric Actuation Mechanism, Technical Digest, Perth, Australia, pp. 277 - 277, presented at 5th Asia-Pacific Confrence on Transducers and Micro-Nano Technology, Perth, Australia, 06 July 2010 - 09 July 2010

Kwok CY; Al-Hafiz MA; Xu Y; Michael AW, 2010, 'Issues in IC 3D Integration: Electrical, Optical, Fluidic Connectivity', in Proceedings of the Joint Workshop on Frontier Photonics and Electronics, School of Electrical & Telecommunications, UNSW, Sydney, Australia, pp. 40 - 43, presented at Proceedings of the Joint Workshop on Frontier Photonics and Electronics, Sydney, Australia, 04 March 2010 - 05 March 2010

Xu Y; Michael AW; Kwok CY, 2008, 'Wet anisotropic etching by TMAH with NCW-1002 surfactant on crystalline silicon surface', in SPIE Smart Materials Nano+Micro-Smart Systems, Melbourne, Victoria, Australia, presented at Micro- and Nanoengineering IV and Complex Systems, Melbourne, Victoria, Australia, 10 December 2008 - 12 December 2008, http://dx.doi.org/10.1117/12.810451

Al-Hafiz MA; Mackenzie MR; Kwok CY, 2008, 'Theoretical analysis of free-space optical coupling loss in a multilevel optical system', in SPIE Smart Materials Nano+Micro-Smart Systems, Australia, presented at Smart Structures, Devices, and Systems IV, Australia, 09 December 2008 - 12 December 2008, http://dx.doi.org/10.1117/12.810212

Xu Y; Michael AW; Kwok CY, 2008, 'Investigation of Low TMAH concentration solution with NCW-601 Triton X-100 Surfactant on silicon surface.', in EUROSENSORS XXII 2008, EUROSENSORS XXII 2008, Germany, presented at EUROSENSORS XXII 2008, Germany, 07 September 2008 - 10 September 2008

Michael AW; Kwok CY, 2008, 'Fabrication of monolithically integrated micromirror into a micro-bridge actuator using thin silicon substrate', in 4th Asia Pacific Conference on Transducers and Micro / Nano Technologies, 4th Asia Pacific Conference, Taiwan, presented at 4th Asia Pacific Conference, Taiwan, 22 June 2008 - 25 June 2008

Michael AW; Kwok CY, 2008, 'Fabrication of monolthically integrated micromirror into a micro-bridge actuator using thin silicon substrate', in 4th Asia Pacific Conference on Transducers and Micro / Nano Technologies, 4th Asia Pacific Conference, Taiwan, presented at 4th Asia Pacific Conference, Taiwan, 22 June 2008 - 25 June 2008

Kwok CY; Michael AW; Xu Y, 2008, 'Techniques for improvement of 45 degrees micromirrors fabricated in silicon.', in 4th Asia Pacific Conference on Transducers and Micro / Nano Technologies, 4th Asia Pacific Conference, Taiwan, presented at 4th Asia Pacific Conference, Taiwan, 22 June 2008 - 25 June 2008

Michael AW; Kwok CY; Kaalund CJ, 2008, 'Novel out-of-plane micro-mirror actuator - art. no. 68000Q', in Tan HH; Chiao JC; Faraone L; Jagadish C; Williams J; Wilson AR (eds.), Proceedings of SPIE Volume 7503, SPIE, Washington, USA, pp. Q8000 - Q8000, presented at Optical and IR Telescope Instrumentation and Detectors, Canberra, AUSTRALIA, http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000254227200014&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=891bb5ab6ba270e68a

Xu Y; Michael AW; Kwok CY, 2007, 'Fabrication of smooth 45 degrees micromirror using TMAH low concentration solution with NCW-601A surfactant on silicon - art. no. 68001W', in Proceedings of SPIE Volume 7503, SPIE, Washington, USA, presented at International Conference on Legal, Security and Privacy Issues in IT Law, Beijing, China, 05 December 2007 - 07 December 2007

Kwok CY; Michael AW; Xu Y, 2007, 'Fabrication of smooth 45 micromirror using TMAH low concentration solution with NCW-601A surfactant on silicon', in SPIE 2007: Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV, Beijing, China, presented at International Conference on Legal, Security and Privacy Issues in IT Law, Beijing, China, 05 December 2007 - 07 December 2007, http://dx.doi.org/10.1117/12.759343

Kwok CY; Michael AW; Kaalund CJ, 2007, 'Novel out-of-plane micro-mirror actuator', in SPIE 2007: Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV, Beijing, China, presented at International Conference on Legal, Security and Privacy Issues in IT Law, Beijing, China, 05 December 2007 - 07 December 2007, http://dx.doi.org/10.1117/12.759340

Michael AW; Kwok CY, 2006, 'Thermo-elastic behaviour of buckled multi-layered MEMS bridge: model and experiment', in IEEE Sensors 2006, Daegu, Korea, pp. 546 - 549, presented at IEEE Sensors 2006, Daegu, Korea, 22 October 2006 - 23 October 2006, http://dx.doi.org/10.1109/ICSENS.2007.355526

Michael AW; Mackenzie MR; Yu KS; Kwok CY, 2005, 'Out-Of-Plane Electrothermally Actuated Bistable Buckled Microbridge Actuator', in Tang WC (ed.), 4th IEEE Conference on Sensors Proceedings, Irvine, CA, pp. 596 - 599, presented at 4th IEEE Conference on Sensors Proceedings, Irvine, CA, 31 October 2005 - 03 November 2005, http://dx.doi.org/10.1109/ICSENS.2005.1597769

Michael AW; Kwok CY, 2005, 'Design Method for Bi-Stable Multi-Layered MEMS Bridge', in Morante JR (ed.), EUROSENSORS XIX, EUROSENSORS XIX, Barcelona, Spain, presented at EUROSENSORS XIX, Barcelona, Spain, 11 September 2005 - 14 September 2005

Lehmann T; Hasan T; Kwok CY, 2005, 'A 5V Charge Pump in a standard 1.8-V 0.18-um CMOS process', in IEEE International Symposium on Circuits and Systems (ISCAS 2005), Kobe, Japan, pp. 1899 - 1902, presented at IEEE International Symposium on Circuits and Systems 2005, Kobe, Japan, 23 May 2005 - 26 May 2005, http://dx.doi.org/10.1109/ISCAS.2005.1464983

Mackenzie MR; Kwok CY; Peng G, 2005, 'Integration of Microlens with Planar Lightwave Circuit', in Proceedings of SPIE Volume 7503, SPIE, Washington, USA, pp. 30 - 38, presented at Photonics West 2005, San Jose, California USA, 22 January 2005 - 27 January 2005, http://dx.doi.org/10.1117/12.591373

Kwok CY; Michael AW; Yu KS, 2004, 'Bi-stability behavior of thermally actuated micro-bridge', in Proceedings of SPIE Volume 7503, SPIE, Washington, USA, pp. 733 - 745, presented at SPIE 2004: Smart Materials, Nano-and Micro-Smart Systems, Sydney, 13 December 2004 - 15 December 2004, http://dx.doi.org/10.1117/12.582405

Kwok CY; Chaowicharat E, 2004, 'Fabrication of a nickel seismic mass microaccelerometer', in Proceedings of SPIE Volume 7503, SPIE, Washington, USA, pp. 470 - 477, presented at SPIE 2004: Smart Materials, Nano-and Micro-Smart Systems, Sydney, 13 December 2004 - 15 December 2004, http://dx.doi.org/10.1117/12.581897

Kwok CY; Mackenzie MR; Peng G, 2004, 'Fabrication of integrated lens pair test device', in Proceedings of SPIE Volume 7503, SPIE, Washington, USA, pp. 180 - 185, presented at SPIE 2004: Smart Materials, Nano-and Micro-Smart Systems, Sydney, 13 December 2004 - 15 December 2004, http://dx.doi.org/10.1117/12.582391

Kwok CY; Yu KS; Michael AW, 2004, 'Finite difference based dynamic modeling of MEMS bridge', in Proceedings of SPIE Volume 7503, SPIE, Washington, USA, pp. 275 - 287, presented at SPIE 2004: Smart Materials, Nano-and Micro-Smart Systems, Sydney, 13 December 2004 - 15 December 2004, http://dx.doi.org/10.1117/12.582404

Kwok CY; Michael AW; Yu KS, 2004, 'Two-way bistable out-of-plane actuator using Ti/Sio2 bilayer', in Proceedings of SPIE Volume 7503, SPIE, Washington, USA, pp. 721 - 732, presented at SPIE 2004: Smart Materials, Nano-and Micro-Smart Systems, Sydney, 13 December 2004 - 15 December 2004, http://dx.doi.org/10.1117/12.582396

Kwok CY; Michael AW; Yu KS, 2004, 'Dynamic modeling of bi-stable tri-layer micro-bridge', in Eurosensor XVIII, Eurosensor XVIII, Rome, Italy, pp. 940 - 943, presented at Eurosensor XVIII, Rome, Italy, 12 September 2004 - 15 September 2004

Kwok CY; Mackenzie MR; Peng G, 2004, 'Fabrication of silica integrated planar optical waveguide lens pair', in Moriizumi T; Fujita H (ed.), Asia-Pacific Conference of Transducers and Nicro-Nano Technology 2004, Asia-Pacific Conference of Transducers and Nicro-Nano Technology 2004, Sapporo, Japan, pp. 287 - 290, presented at Asia-Pacific Conference of Transducers and Nicro-Nano Technology 2004, Sapporo, Japan, 04 July 2004 - 08 July 2004

Timchenko V; Reizes JA; Mackenzie MR; Kwok CY; Leonardi E, 2004, 'MEMS actuated synthetic jets for integrated circuit cooling', in Asia-Pacific Conference of Transducers and Nicro-Nano Technology 2004, Asia-Pacific Conference of Transducers and Nicro-Nano Technology 2004, Sapporo, Japan, presented at Asia-Pacific Conference of Transducers and Nicro-Nano Technology 2004, Sapporo, Japan, 04 July 2004 - 08 July 2004

Kwok CY; Michael AW; Yu KS, 2004, 'Two-way bi-stable out-of-plane actuation using composite bimorph bridge', in Moriizumi T; Fujita H (ed.), Asia-Pacific Conference of Transducers and Nicro-Nano Technology 2004, Asia-Pacific Conference of Transducers and Nicro-Nano Technology 2004, Sapporo, Japan, pp. 889 - 892, presented at Asia-Pacific Conference of Transducers and Nicro-Nano Technology 2004, Sapporo, Japan, 04 July 2004 - 08 July 2004

Kwok CY; Michael AW; Yu KS, 2003, 'A Novel Bistable Themmally Actuated Snap-Through Acturator for Out of Plane Deflection', in Device and Process Technologies for MEMS, Microelectronics and Photonics III, Perth, WA, pp. 442 - 450, presented at Device and Process Technologies for MEMS, Microelectronics and Photonics III, Perth, WA, 10 December 2003 - 12 December 2003, http://dx.doi.org/10.1117/12.523272

Kwok CY; Michael AW; Yu KS, 2003, 'Theoretical Analysis of Initially Buckled, Thermally Actuated, and Snapping Bimorph Micro Bridge', in Device and Process Technologies for MEMS, Microelectronics and Photonics III, Perth, WA, pp. 540 - 547, presented at Device and Process Technologies for MEMS, Microelectronics and Photonics III, Perth, WA, 10 December 2003 - 12 December 2003, http://dx.doi.org/10.1117/12.522893

Kwok CY; Wibowo E; Lovell NH, 2003, 'Two-way Actuation of Bi-layer Cantilever of Nickel Titanium and Silicon Nitride Thin Films by Shape Memory Effect and Stress Relaxation', in Device and Process Technologies for MEMS, Microelectronics and Photonics III, Perth, WA, pp. 351 - 359, presented at Device and Process Technologies for MEMS, Microelectronics and Photonics III, Perth, WA, 10 December 2003 - 12 December 2003, http://dx.doi.org/10.1117/12.521412

Mackenzie MR; Kwok CY; Peng G, 2002, 'Modelling of MOEM focusing element', in 16th European Conference on Solid-State Transducers, 16th European Conference on Solid-State Transducers, Prague, Czech Republic, pp. 29 - 30, presented at 16th European Conference on Solid-State Transducers, Prague, Czech Republic, 15 September 2002 - 18 September 2002

Suaning GJ; Lovell NH; Kwok CY, 2002, 'Fabricationof platinum spherical electrodes in an intra-ocular prosthesis using high-energy electrical discharge.', in Pacific RimWorkshop on Transducers and Micro/Nano Technologies, Pacific RimWorkshop on Transducers and Micro/Nano Technologies, Xiamen China, pp. 1 - 4, presented at Pacific RimWorkshop on Transducers and Micro/Nano Technologies, Xiamen China, 22 July 2002 - 24 July 2002

Kwok CY; Mackenzie MR, 2002, 'Integrated collimating waveguide lens pair', in Pacific RIM Workshop on Transducers and Micro/Nano Technologies, Pacific RimWorkshop on Transducers and Micro/Nano Technologies, Xiamen China, pp. 581 - 584, presented at Pacific RimWorkshop on Transducers and Micro/Nano Technologies, Xiamen China, 22 July 2002 - 24 July 2002

Rojanapornpun O; Kwok CY, 2001, 'Fabrication of Integrated Micromachined Polymer Magnet', in SPIE 2001: Device and Process Technologies for MEMS and Microelectronics II, Adelaide, Sth Aust, pp. 347 - 354, presented at SPIE 2001: BioMEMS and Smart Nanostructures, Adelaide, Sth Aust, 17 December 2001 - 19 December 2001, http://dx.doi.org/10.1117/12.448986

Mackenzie MR, 2001, 'MOEM Based optical switch collimating lens', in SPIE 2001: Design, Characterization and Packaging for MEMS and Microelectronics II, Adelaide, Sth Aust, pp. 89 - 96, presented at SPIE 2001: BioMEMS and Smart Nanostructures, Adelaide, Sth Aust, 17 December 2001 - 19 December 2001, http://dx.doi.org/10.1117/12.448848


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