By Professor Chee Yee Kwok

Journal articles

Michael A; Chuang IYH; Kwok CY; Omaki K, 2024, 'Low-thermal-budget electrically active thick polysilicon for CMOS-First MEMS-last integration', Microsystems and Nanoengineering, 10, http://dx.doi.org/10.1038/s41378-024-00678-5

Ho YN; Michael A; Kwok CY; Pulikkaseril C, 2024, 'Parallel in-Plane Electrothermal Actuators', Journal of Microelectromechanical Systems, 33, pp. 305 - 307, http://dx.doi.org/10.1109/JMEMS.2024.3381836

Rasid SMR; Michael A; Chen SH; Pota HR; Kwok CY, 2020, 'Dynamic Performance Improvement of Piezoelectrically Driven Micro-Lens Actuators', Journal of Microelectromechanical Systems, 29, pp. 1418 - 1420, http://dx.doi.org/10.1109/JMEMS.2020.3032670

Sengupta D; Chen SH; Michael A; Kwok CY; Lim S; Pei Y; Kottapalli AGP, 2020, 'Single and bundled carbon nanofibers as ultralightweight and flexible piezoresistive sensors', npj Flexible Electronics, 4, pp. 9, http://dx.doi.org/10.1038/s41528-020-0072-2

Chen SH; Michael A; Kwok CY, 2020, 'Enhancing out-of-plane stroke in piezoelectrically driven micro-lens actuator with residual stress control', Sensors and Actuators, A: Physical, 303, http://dx.doi.org/10.1016/j.sna.2019.111620

Chen SH; Michael A; Kwok CY, 2019, 'Design and Modeling of Piezoelectrically Driven Micro-Actuator with Large Out-of-Plane and Low Driving Voltage for Micro-Optics', Journal of Microelectromechanical Systems, 28, pp. 919 - 932, http://dx.doi.org/10.1109/JMEMS.2019.2935007

Chuang I; Michael A; Soeriyadi A; Kwok CY, 2018, 'Aluminum Induced Crystallization of In-Situ Phosphorus Doped E-Beam Evaporated Silicon Films for High Gauge Factor Piezo-Resistors', IEEE Electron Device Letters, 39, pp. 889 - 892, http://dx.doi.org/10.1109/LED.2018.2829481

Wang P; Michael A; Kwok CY, 2018, 'Silicon waveguide cantilever displacement sensor for potential application for on-chip high speed AFM', Frontiers of Optoelectronics, 11, pp. 53 - 59, http://dx.doi.org/10.1007/s12200-018-0774-4

Chen SH; Michael A; Kwok CY, 2017, 'Enabling PZT bimorph actuator with passive polysilicon structure', Electronics Letters, 53, pp. 1373 - 1375, http://dx.doi.org/10.1049/el.2017.2714

Michael AW; Wang P; Kwok CY, 2017, 'Cantilever Inverse Taper Coupler with SiO2 Gap for Submicron Silicon Waveguides,', IEEE Photonics Technology Letters, 29, http://dx.doi.org/10.1109/LPT.2017.2723901

Michael A; Wang P; Kwok CY, 2017, 'High aspect ratio sharp nanotip for nanocantilever integration at CMOS compatible temperature', Nanotechnology, 28, http://dx.doi.org/10.1088/1361-6528/aa7a54

Chen SH; Sengupta D; Kwok C; Ebrahimi Warkiani M, 2017, 'Characterization of single polyvinylidene fluoride (PVDF) nanofiber for flow sensing applications', AIP Advances, 7, pp. 105205, http://dx.doi.org/10.1063/1.4994968

Chen SH; Michael A; Kwok CY, 2016, 'E-beam Evaporated Polysilicon for Lead Zirconate Titanate-Based Micro-Actuators', IEEE Electron Device Letters, 37, pp. 1347 - 1350, http://dx.doi.org/10.1109/LED.2016.2600639

Al Hafiz MA; Michael A; Kwok CY, 2016, 'Planar microlens with front-face angle: Design, fabrication, and characterization', Journal of Micro/ Nanolithography, MEMS, and MOEMS, 15, http://dx.doi.org/10.1117/1.JMM.15.3.035501

Michael A; Chen SS; Kwok CY, 2016, 'Feedback Driven Fast Piezoelectric Micro-lens Actuator', Procedia Engineering, 168, pp. 1492 - 1495, http://dx.doi.org/10.1016/j.proeng.2016.11.432

Michael A; Kwok CY; Wang P; Kazuo O; Varlamov S, 2015, 'Investigation of E-Beam Evaporated Silicon Film Properties for MEMS Applications', Journal of Microelectromechanical Systems, 24, pp. 1951 - 1959, http://dx.doi.org/10.1109/JMEMS.2015.2453191

Michael A; Kwok CY, 2015, 'Piezoelectric micro-lens actuator', Sensors and Actuators, A: Physical, 236, pp. 116 - 129, http://dx.doi.org/10.1016/j.sna.2015.10.035

Wang P; Michael A; Kwok CY, 2014, 'Fabrication of sub-micro silicon waveguide with vertical sidewall and reduced roughness for low loss applications', Procedia Engineering, 87, pp. 979 - 982, http://dx.doi.org/10.1016/j.proeng.2014.11.322

Michael A; Kwok CY, 2014, 'Inter-digitated piezoelectric actuation mechanism for micro-optics application', Procedia Engineering, 87, pp. 1394 - 1397, http://dx.doi.org/10.1016/j.proeng.2014.11.703

Michael AW; Peng W; Kwok CY, 2013, 'On-chip optical nano-scale displacement sensor', Micro/Nano Materials, Devices, and Systems, http://dx.doi.org/10.1117/12.2033715

Michael A; Kwok CY, 2013, 'Evaporated thick polysilicon film with low stress and low thermal budget', Journal of Microelectromechanical Systems, 22, pp. 825 - 827, http://dx.doi.org/10.1109/JMEMS.2013.2248129

Xu Y; Michael AW; Kwok CY; Puzzer T; Peng G, 2012, '1D planar silica lens integrated 3D optical interconnect system – fabrication techniques of lens integrated facingdown 45􀁱 micro-mirror', Procedia Engineering, 47, pp. 478 - 481, http://dx.doi.org/10.1016/j.proeng.2012.09.188

Michael AW; Hafiz AA; Puzzer T; Kwok CY, 2012, 'Deposition and characterization of thick graded index Si xO yF z films with low stress', Sensors and Actuators A - Physical, 178, pp. 110 - 117, http://dx.doi.org/10.1016/j.sna.2012.01.036

Xu Y; Michael AW; Kwok CY, 2011, 'Formation of ultra-smooth 45° micromirror on (1 0 0) silicon with low concentration TMAH and surfactant: Techniques for enlarging the truly 45° portion', Sensors and Actuators A - Physical, 166, pp. 164 - 171, http://dx.doi.org/10.1016/j.sna.2010.12.018

Al-Hafiz MA; Michael AW; Puzzer T; Kwok CY, 2010, 'Fabrication and Optical characterisation of planar silica lens pair', Electronics Letters, 46, pp. 1459 - 1460

Kwok CY; Xu Y; Michael AW; Peng G, 2009, 'A novel technique of fabricating rear 45 micromirror for stacked die optical interconnect', , 1

Kwok CY; Al-Hafiz MA; Mackenzie MR, 2009, 'Design methodology of focusing elements for multilevel planar optical systems in optical interconnects', Optical Engineering, 48

Michael AW; Kwok CY; Yu KS; Mackenzie MR, 2008, 'A novel bistable two-way actuated out-of-plane electrothermal microbridge', Journal of Microelectromechanical Systems, 17, pp. 58 - 69, http://dx.doi.org/10.1109/JMEMS.2007.911369

Michael AW; Kwok CY, 2007, 'Buckling shape of elastically constrained multi-layered micro-bridges', Sensors and Actuators A - Physical, 135, pp. 870 - 880, http://dx.doi.org/10.1016/j.sna.2006.10.015

Michael AW; Kwok CY, 2007, 'Thermo-mechanical behaviour of buckled multi-layered micro-bridges', Sensors and Actuators A - Physical, 137, pp. 157 - 168

Michael AW; Kwok CY, 2006, 'Design criteria for bi-stable behaviour in a buckled multi-layered MEMS bridge', Journal of Micromechanics and Microengineering, 16, pp. 2034 - 2043, http://dx.doi.org/10.1088/0960-1317/16/10/016

Mackenzie MR; Kwok CY; Michael AW; Yu K; Kaalund CJ, 2006, 'Etch slope compensation for planar silica waveguide lens pair', Electronics Letters, 42, pp. 2034 - 2043, http://dx.doi.org/10.1049/el:20064434

Kwok CY; Wibowo E, 2006, 'Fabrication and characterization of sputtered NiTi shape memory thin films', Journal of Micromechanics and Microengineering, 16, pp. 101 - 108, http://dx.doi.org/10.1088/0960-1317/16/1/014

Lehmann T; Kwok CY; Hasan T, 2005, 'On-chip high voltage charge pump in standard low voltage CMOS process', Electronics Letters, 41, pp. 840 - 842

Yu K; Michael AW; Kwok CY, 2005, 'Two- Way bistable out-of-plane actuator using Ti/Sio2 Bilayer', Proceedings of SPIE Volume 7503, 5649, pp. 721 - 732, http://dx.doi.org/10.1117/12.582396

Suaning GJ; Lovell NH; Kwok CY, 2003, 'Fabrication of platinum spherical electrodes in an intra-ocular prosthesis using high-energy electrical discharge', Sensors and Actuators A - Physical, 108, pp. 155 - 161

Kwok CY; Mallinson SG; Reizes JA, 2003, 'Numerical Simulation of Micro-Fabricated Zero Mass-Flux Jet Actuators', Sensors and Actuators, 105, pp. 229 - 236

Kwok CY; Mackenzie MR, 2003, 'Theoretical Ananlysis of Integrated Collimating Waveguide Lens', Journal of Lightwave Technology, 21

Kwok CY; Mehrvarz HR, 2001, 'Low voltage and mismatch analysis of quadruple source coupled multi-input floating-gate mosfet multiplier with offset trimming', Analog Integrated Circuits and Signal Processing, pp. 141 - 156

Wong LSY; Kwok CY; Rigby GA, 1999, '1-V CMOS D/A converter with multi-input floating-gate MOSFET', IEEE Journal of Solid-State Circuits, 34, pp. 1386 - 1390, http://dx.doi.org/10.1109/4.792610

Wong LM; Kwok CY; Rigby GA, 1999, 'A 1V CMOS D/A Converter with Multi-input Floating-gate Mosfet', IEEE Journal of Solid - State Circuits, pp. 1368 - 1390

Mehrvarz HR; Kwok CY, 1998, 'A Pseudologarithmic rectifier using unbalanced bias MFMOS differential pairs', IEEE Journal of Solid - State Circuits, pp. 28 - 35

Haji-Babaei J; Kwok CY; Huang R, 1998, 'An integrable nozzle for monolithic microfuildic devices', Sensors and Actuators A - Physical, pp. 221 - 227

Lin KM; Kwok CY; Huang RS, 1997, 'A strontium titanate thermocapacitive floating gate MOS flow sensor', Sensors and Materials, 9, pp. 131 - 139

Lin K; Kwok CY; Huang R, 1996, 'A modified MOS IC process suited for bulk micromachining', Journal of Micromechanics and Microengineering, pp. 236 - 239

Mehrvarz HR; Kwok CY, 1996, 'A novel multi-input floating gate MOS four-quadrant analog multiplier', IEEE Journal of Solid - State Circuits, pp. 1123 - 1131

Kwok CY; Lin K; Huang R, 1996, 'A silicon thermo-capacitive flow sensor with frequency modulated output', Sensors and Actuators A - Physical, pp. 35 - 39

Lin K; Kwok CY; Huang R, 1996, 'A thermo-capacitive typw MOS flow sensor', IEEE Electron Device Letters, pp. 247 - 249

Lin K; Kwok CY; Huang R, 1996, 'An interested thermo-capacitive type MOS flow sensor', IEEE Electron Device Letters, 17, pp. 247 - 249

Mehrvarz HR; Kwok CY, 1995, 'Large-input-dynamic-range multi-input floating-gate MOS four-quadrant analog multiplier', Digest of Technical Papers - IEEE International Solid-State Circuits Conference, 38, pp. 60 - 61

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