Select Publications

Journal articles

Michael A; Chuang IYH; Kwok CY; Omaki K, 2024, 'Low-thermal-budget electrically active thick polysilicon for CMOS-First MEMS-last integration', Microsystems and Nanoengineering, 10, http://dx.doi.org/10.1038/s41378-024-00678-5

Ho YN; Michael A; Kwok CY; Pulikkaseril C, 2024, 'Parallel in-Plane Electrothermal Actuators', Journal of Microelectromechanical Systems, 33, pp. 305 - 307, http://dx.doi.org/10.1109/JMEMS.2024.3381836

Mirjalali S; Bagherzadeh R; Abrishami S; Asadnia M; Huang S; Michael A; Peng S; Wang CH; Wu S, 2023, 'Multilayered Electrospun/Electrosprayed Polyvinylidene Fluoride+Zinc Oxide Nanofiber Mats with Enhanced Piezoelectricity', Macromolecular Materials and Engineering, 308, http://dx.doi.org/10.1002/mame.202300009

Rasid SMR; Michael A; Pota HR, 2023, 'Dynamic modeling of a piezoelectric micro-lens actuator with experimental validation', Sensors and Actuators A: Physical, 356, http://dx.doi.org/10.1016/j.sna.2023.114344

Rasid SMR; Michael A; Pota HR, 2023, 'On-Chip Self-Sensing Piezoelectric Micro-Lens Actuator With Feedback Control', IEEE Sensors Journal, 23, pp. 10275 - 10284, http://dx.doi.org/10.1109/JSEN.2023.3261965

Rasid SMR; Michael A; Pota HR; Chen SH, 2022, 'Design and Implementation of Robust Resonant Controller for Piezoelectrically Driven Micro-Lens Actuator', Journal of Microelectromechanical Systems, 31, pp. 840 - 850, http://dx.doi.org/10.1109/JMEMS.2022.3194219

Nawaz MH; Michael A; Pota HR; Chen SH; Rasid SMR, 2022, 'A robust resonant controller design for MEMS-based multi-layered prestressed piezoelectric cantilever beam', Sensors and Actuators A: Physical, 341, http://dx.doi.org/10.1016/j.sna.2022.113556

Christoe MJ; Yuan J; Michael A; Kalantar-Zadeh K, 2021, 'Bluetooth Signal Attenuation Analysis in Human Body Tissue Analogues', IEEE Access, 9, pp. 85144 - 85150, http://dx.doi.org/10.1109/ACCESS.2021.3087780

Christoe MJ; Phaoseree N; Han J; Michael A; Atakaramians S; Kalantar-Zadeh K, 2021, 'Meandering Pattern 433 MHz Antennas for Ingestible Capsules', IEEE Access, 9, pp. 91874 - 91882, http://dx.doi.org/10.1109/ACCESS.2021.3092068

Rasid SMR; Michael A; Chen SH; Pota HR; Kwok CY, 2020, 'Dynamic Performance Improvement of Piezoelectrically Driven Micro-Lens Actuators', Journal of Microelectromechanical Systems, 29, pp. 1418 - 1420, http://dx.doi.org/10.1109/JMEMS.2020.3032670

Sengupta D; Chen SH; Michael A; Kwok CY; Lim S; Pei Y; Kottapalli AGP, 2020, 'Single and bundled carbon nanofibers as ultralightweight and flexible piezoresistive sensors', npj Flexible Electronics, 4, pp. 9, http://dx.doi.org/10.1038/s41528-020-0072-2

Chen SH; Michael A; Kwok CY, 2020, 'Enhancing out-of-plane stroke in piezoelectrically driven micro-lens actuator with residual stress control', Sensors and Actuators, A: Physical, 303, http://dx.doi.org/10.1016/j.sna.2019.111620

Chen SH; Michael A; Kwok CY, 2019, 'Design and Modeling of Piezoelectrically Driven Micro-Actuator with Large Out-of-Plane and Low Driving Voltage for Micro-Optics', Journal of Microelectromechanical Systems, 28, pp. 919 - 932, http://dx.doi.org/10.1109/JMEMS.2019.2935007

Chuang I; Michael A; Soeriyadi A; Kwok CY, 2018, 'Aluminum Induced Crystallization of In-Situ Phosphorus Doped E-Beam Evaporated Silicon Films for High Gauge Factor Piezo-Resistors', IEEE Electron Device Letters, 39, pp. 889 - 892, http://dx.doi.org/10.1109/LED.2018.2829481

Wang P; Michael A; Kwok CY, 2018, 'Silicon waveguide cantilever displacement sensor for potential application for on-chip high speed AFM', Frontiers of Optoelectronics, 11, pp. 53 - 59, http://dx.doi.org/10.1007/s12200-018-0774-4

Chen SH; Michael A; Kwok CY, 2017, 'Enabling PZT bimorph actuator with passive polysilicon structure', Electronics Letters, 53, pp. 1373 - 1375, http://dx.doi.org/10.1049/el.2017.2714

Michael AW; Wang P; Kwok CY, 2017, 'Cantilever Inverse Taper Coupler with SiO2 Gap for Submicron Silicon Waveguides,', IEEE Photonics Technology Letters, 29, http://dx.doi.org/10.1109/LPT.2017.2723901

Michael A; Wang P; Kwok CY, 2017, 'High aspect ratio sharp nanotip for nanocantilever integration at CMOS compatible temperature', Nanotechnology, 28, http://dx.doi.org/10.1088/1361-6528/aa7a54

Chen SH; Michael A; Kwok CY, 2016, 'E-beam Evaporated Polysilicon for Lead Zirconate Titanate-Based Micro-Actuators', IEEE Electron Device Letters, 37, pp. 1347 - 1350, http://dx.doi.org/10.1109/LED.2016.2600639

Al Hafiz MA; Michael A; Kwok CY, 2016, 'Planar microlens with front-face angle: Design, fabrication, and characterization', Journal of Micro/ Nanolithography, MEMS, and MOEMS, 15, http://dx.doi.org/10.1117/1.JMM.15.3.035501

Michael A; Chen SS; Kwok CY, 2016, 'Feedback Driven Fast Piezoelectric Micro-lens Actuator', Procedia Engineering, 168, pp. 1492 - 1495, http://dx.doi.org/10.1016/j.proeng.2016.11.432

Michael A; Kwok CY; Wang P; Kazuo O; Varlamov S, 2015, 'Investigation of E-Beam Evaporated Silicon Film Properties for MEMS Applications', Journal of Microelectromechanical Systems, 24, pp. 1951 - 1959, http://dx.doi.org/10.1109/JMEMS.2015.2453191

Michael A; Kwok CY, 2015, 'Piezoelectric micro-lens actuator', Sensors and Actuators, A: Physical, 236, pp. 116 - 129, http://dx.doi.org/10.1016/j.sna.2015.10.035

Wang P; Michael A; Kwok CY, 2014, 'Fabrication of sub-micro silicon waveguide with vertical sidewall and reduced roughness for low loss applications', Procedia Engineering, 87, pp. 979 - 982, http://dx.doi.org/10.1016/j.proeng.2014.11.322

Michael A; Kwok CY, 2014, 'Inter-digitated piezoelectric actuation mechanism for micro-optics application', Procedia Engineering, 87, pp. 1394 - 1397, http://dx.doi.org/10.1016/j.proeng.2014.11.703

Michael AW; Peng W; Kwok CY, 2013, 'On-chip optical nano-scale displacement sensor', Micro/Nano Materials, Devices, and Systems, http://dx.doi.org/10.1117/12.2033715

Michael A; Kwok CY, 2013, 'Evaporated thick polysilicon film with low stress and low thermal budget', Journal of Microelectromechanical Systems, 22, pp. 825 - 827, http://dx.doi.org/10.1109/JMEMS.2013.2248129

Xu Y; Michael AW; Kwok CY; Puzzer T; Peng G, 2012, '1D planar silica lens integrated 3D optical interconnect system – fabrication techniques of lens integrated facingdown 45􀁱 micro-mirror', Procedia Engineering, 47, pp. 478 - 481, http://dx.doi.org/10.1016/j.proeng.2012.09.188

Michael AW; Hafiz AA; Puzzer T; Kwok CY, 2012, 'Deposition and characterization of thick graded index Si xO yF z films with low stress', Sensors and Actuators A - Physical, 178, pp. 110 - 117, http://dx.doi.org/10.1016/j.sna.2012.01.036

Xu Y; Michael AW; Kwok CY; Puzzer T; Peng G, 2012, 'Integration of 1D planar silica grin lens in 3D optical interconnect system', Electronics Letters, 48, pp. 585 - 586, http://dx.doi.org/10.1049/el.2012.0754

Michael AW; Kwok CY, 2012, 'Monolithically integrated out-of-plane micro-mirror', Sensors and Actuators A - Physical, 179, pp. 263 - 276, http://dx.doi.org/10.1016/j.sna.2012.03.028

Xu Y; Michael AW; Kwok CY, 2011, 'Formation of ultra-smooth 45° micromirror on (1 0 0) silicon with low concentration TMAH and surfactant: Techniques for enlarging the truly 45° portion', Sensors and Actuators A - Physical, 166, pp. 164 - 171, http://dx.doi.org/10.1016/j.sna.2010.12.018

Michael AW; Kwok CY, 2011, 'Piezoelectrically driven micro-lens out-of-plane actuation', Procedia Engineering, 25, pp. 697 - 700, http://dx.doi.org/10.1016/j.proeng.2011.12.172

Kwok CY; Xu Y; Michael AW; Peng G, 2009, 'A novel technique of fabricating rear 45 micromirror for stacked die optical interconnect', , 1

Michael AW; Kwok CY; Yu KS; Mackenzie MR, 2008, 'A novel bistable two-way actuated out-of-plane electrothermal microbridge', Journal of Microelectromechanical Systems, 17, pp. 58 - 69, http://dx.doi.org/10.1109/JMEMS.2007.911369

Michael AW; Kwok CY, 2007, 'Buckling shape of elastically constrained multi-layered micro-bridges', Sensors and Actuators A - Physical, 135, pp. 870 - 880, http://dx.doi.org/10.1016/j.sna.2006.10.015

Michael AW; Kwok CY, 2007, 'Thermo-mechanical behaviour of buckled multi-layered micro-bridges', Sensors and Actuators A - Physical, 137, pp. 157 - 168

Michael AW; Kwok CY, 2006, 'Design criteria for bi-stable behaviour in a buckled multi-layered MEMS bridge', Journal of Micromechanics and Microengineering, 16, pp. 2034 - 2043, http://dx.doi.org/10.1088/0960-1317/16/10/016

Mackenzie MR; Kwok CY; Michael AW; Yu K; Kaalund CJ, 2006, 'Etch slope compensation for planar silica waveguide lens pair', Electronics Letters, 42, pp. 2034 - 2043, http://dx.doi.org/10.1049/el:20064434

Yu K; Michael AW; Kwok CY, 2005, 'Two- Way bistable out-of-plane actuator using Ti/Sio2 Bilayer', Proceedings of SPIE Volume 7503, 5649, pp. 721 - 732, http://dx.doi.org/10.1117/12.582396


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