Select Publications
Preprints
2023, Low Thermal Budget Electrically Active Thick Polysilicon for Post CMOS MEMS-Last Integration, http://dx.doi.org/10.21203/rs.3.rs-3556585/v1
,Select Publications
2023, Low Thermal Budget Electrically Active Thick Polysilicon for Post CMOS MEMS-Last Integration, http://dx.doi.org/10.21203/rs.3.rs-3556585/v1
,