By Dr Aron Woldeghiorgis Michael

Conference Papers

Sengupta D; Prakash Kottapalli AG; Chen S-H; Michael A; Kwok C; Miao J; Triantafyllou MS, 2018, 'Flexible Graphitized Polyacrylonitrile Nanofiber Bundles for Strain Sensors', Singapore, Singapore, presented at 2018 IEEE 13th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), Singapore, Singapore, 22 April 2018 - 26 April 2018, http://dx.doi.org/10.1109/NEMS.2018.8556930

Chuang I; Michael A; Soeriyadi A; Kwok CY, 2018, 'In-situ phosphorus doped ultra-high vacuum e-beam evaporated silicon for high gauge factor polysilicon', in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Belfast, UK, pp. 1040 - 1043, presented at 2018 IEEE Micro Electro Mechanical Systems (MEMS), Belfast, UK, 21 January 2018 - 25 January 2018, http://dx.doi.org/10.1109/MEMSYS.2018.8346737

Michael AW; Chuang I; Kwok C, 2017, 'High Gauge Factor Piezoresistors Using Aluminium Induced Crystallisation of Silicon at Low Thermal Budget', in Proceedings, MDPI, France, Paris, pp. 354, presented at Eurosensors, France, Paris, 03 September 2017 - 06 September 2017, http://dx.doi.org/10.3390/proceedings1040354

Michael AW; Chen S-H; Wang P; Chuang I; Kwok CY; Liu A, 2017, 'Fabrication of Bimorph PZT Micro-Actuators with Passive Polysilicon Structure', Singapore, presented at The 7th International Multidisciplinary Conference on Optofluidics 2017, Singapore, 25 July 2017 - 28 July 2017, http://dx.doi.org/10.3390/optofluidics2017-04225

Michael AW; Wang P; Chen SH; Chuang I; Kwok CY, 2017, 'Fabrication of nano-scale high aspect ratio ultra sharp tips for nano-mechanical structures at low thermal budget', in TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems, Institute of Electrical and Electronics Engineers (IEEE), Kaohsiung, pp. 1328 - 1331, presented at Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2017 19th International Conference on, Kaohsiung, 18 June 2017 - 22 June 2017, http://dx.doi.org/10.1109/TRANSDUCERS.2017.7994301

Michael A; Kwok C; Chen S-H, 2015, 'Design, fabrication, and characterisation of interdigitated piezo-electric actuation mechanism for mixing-optics', in 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015, Institute of Electrical and Electronics Engineers (IEEE), Anchorage, pp. 2101 - 2104, presented at Solid-state sensors, actuators and Microsystems, Anchorage, 21 June 2015 - 25 June 2015, http://dx.doi.org/10.1109/TRANSDUCERS.2015.7181372

Chen SH; Michael A; Kwok CY; Wang P, 2015, 'Design and simulation of piezoelectric PZT micro-actuators with integrated piezoresistive displacement sensors for micro-optics applications', in Proceedings of SPIE - The International Society for Optical Engineering, http://dx.doi.org/10.1117/12.2202502

Wang P; Michael A; Kwok CY; Chen SH, 2015, 'Misalignment tolerant efficient inverse taper coupler for silicon waveguide', in Proceedings of SPIE - The International Society for Optical Engineering, http://dx.doi.org/10.1117/12.2202494

Micahel A; Al Hafiz MA; Kwok CY, 2014, 'Effect of front face angle on the performance of planar GRIN silica micro-lens', in 7th Asia-Pacific Conf. on Transducers and Micro/Nano Technologies(APCOT),Daegu, Korea, 29 Jun - 2 Jul 2014

Michael A; Kwok CY, 2013, 'LOW THERMAL BUDGET LOW STRESS THICK POLYSILICON FILMS FOR MEMS USING ULTRA-HIGH VACUUM E-BEAM EVAPORATION', Spain, presented at Transducers, Spain, 16 June 2013 - 20 June 2013, http://dx.doi.org/10.1109/Transducers.2013.6627173

Xu Y; Michael AW; Kwok CY; Peng G, 2010, 'Detail study on the rear 45° micromirror smoothness on (100) Si substrates', in Procedia Engineering, Elsevier BV, Netherlands, pp. 858 - 861, presented at 24th Eurosensors Conference, Linz, 05 September 2010 - 08 September 2010, http://dx.doi.org/10.1016/j.proeng.2010.09.244

Xu Y; Michael AW; Kwok CY, 2008, 'Wet anisotropic etching by TMAH with NCW-1002 surfactant on crystalline silicon surface', in SPIE Smart Materials Nano+Micro-Smart Systems, Melbourne, Victoria, Australia, presented at Micro- and Nanoengineering IV and Complex Systems, Melbourne, Victoria, Australia, 10 December 2008 - 12 December 2008

Xu Y; Michael AW; Kwok CY, 2008, 'Investigation of Low TMAH concentration solution with NCW-601 Triton X-100 Surfactant on silicon surface.', in EUROSENSORS XXII 2008, Germany, presented at EUROSENSORS XXII 2008, Germany, 07 September 2008 - 10 September 2008

Michael AW; Kwok CY, 2008, 'Fabrication of monolithically integrated micromirror into a micro-bridge actuator using thin silicon substrate', in 4th Asia Pacific Conference on Transducers and Micro / Nano Technologies, Taiwan, presented at 4th Asia Pacific Conference, Taiwan, 22 June 2008 - 25 June 2008

Michael AW; Kwok CY, 2008, 'Fabrication of monolthically integrated micromirror into a micro-bridge actuator using thin silicon substrate', in 4th Asia Pacific Conference on Transducers and Micro / Nano Technologies, Taiwan, presented at 4th Asia Pacific Conference, Taiwan, 22 June 2008 - 25 June 2008

Kwok CY; Michael AW; Xu Y, 2008, 'Techniques for improvement of 45 degrees micromirrors fabricated in silicon.', in 4th Asia Pacific Conference on Transducers and Micro / Nano Technologies, Taiwan, presented at 4th Asia Pacific Conference, Taiwan, 22 June 2008 - 25 June 2008

Michael AW; Kwok CY; Kaalund CJ, 2008, 'Novel out-of-plane micro-mirror actuator - art. no. 68000Q', in Proceedings of SPIE Volume 7503, SPIE, Washington, USA, presented at Optical and IR Telescope Instrumentation and Detectors

Xu Y; Michael AW; Kwok CY, 2007, 'Fabrication of smooth 45 degrees micromirror using TMAH low concentration solution with NCW-601A surfactant on silicon - art. no. 68001W', in Proceedings of SPIE Volume 7503, SPIE, Washington, USA, presented at International Conference on Legal, Security and Privacy Issues in IT Law, Beijing, China, 05 December 2007 - 07 December 2007

Kwok CY; Michael AW; Xu Y, 2007, 'Fabrication of smooth 45 micromirror using TMAH low concentration solution with NCW-601A surfactant on silicon', in SPIE 2007: Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV, Beijing, China, presented at International Conference on Legal, Security and Privacy Issues in IT Law, Beijing, China, 05 December 2007 - 07 December 2007

Kwok CY; Michael AW; Kaalund CJ, 2007, 'Novel out-of-plane micro-mirror actuator', in SPIE 2007: Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV, Beijing, China, presented at International Conference on Legal, Security and Privacy Issues in IT Law, Beijing, China, 05 December 2007 - 07 December 2007

Michael AW; Kwok CY, 2006, 'Thermo-elastic behaviour of buckled multi-layered MEMS bridge: model and experiment', in IEEE Sensors 2006, Daegu, Korea, presented at IEEE Sensors 2006, Daegu, Korea, 22 October 2006 - 23 October 2006

Michael AW; Mackenzie MR; Yu KS; Kwok CY, 2005, 'Out-Of-Plane Electrothermally Actuated Bistable Buckled Microbridge Actuator', in Tang WC (ed.), 4th IEEE Conference on Sensors Proceedings, Irvine, CA, pp. 596 - 599, presented at 4th IEEE Conference on Sensors Proceedings, Irvine, CA, 31 October 2005 - 03 November 2005

Michael AW; Kwok CY, 2005, 'Design Method for Bi-Stable Multi-Layered MEMS Bridge', in Morante JR (ed.), EUROSENSORS XIX, Barcelona, Spain, presented at EUROSENSORS XIX, Barcelona, Spain, 11 September 2005 - 14 September 2005

Kwok CY; Michael AW; Yu KS, 2004, 'Bi-stability behavior of thermally actuated micro-bridge', in Proceedings of SPIE Volume 7503, SPIE, Washington, USA, presented at SPIE 2004: Smart Materials, Nano-and Micro-Smart Systems, Sydney, 13 December 2004 - 15 December 2004

Kwok CY; Yu KS; Michael AW, 2004, 'Finite difference based dynamic modeling of MEMS bridge', in Proceedings of SPIE Volume 7503, SPIE, Washington, USA, presented at SPIE 2004: Smart Materials, Nano-and Micro-Smart Systems, Sydney, 13 December 2004 - 15 December 2004

Kwok CY; Michael AW; Yu KS, 2004, 'Two-way bistable out-of-plane actuator using Ti/Sio2 bilayer', in Proceedings of SPIE Volume 7503, SPIE, Washington, USA, presented at SPIE 2004: Smart Materials, Nano-and Micro-Smart Systems, Sydney, 13 December 2004 - 15 December 2004

Kwok CY; Michael AW; Yu KS, 2004, 'Dynamic modeling of bi-stable tri-layer micro-bridge', in Eurosensor XVIII, Rome, Italy, pp. 940 - 943, presented at Eurosensor XVIII, Rome, Italy, 12 September 2004 - 15 September 2004

Kwok CY; Michael AW; Yu KS, 2004, 'Two-way bi-stable out-of-plane actuation using composite bimorph bridge', in Moriizumi T; Fujita H (ed.), Asia-Pacific Conference of Transducers and Nicro-Nano Technology 2004, Sapporo, Japan, pp. 889 - 892, presented at Asia-Pacific Conference of Transducers and Nicro-Nano Technology 2004, Sapporo, Japan, 04 July 2004 - 08 July 2004

Kwok CY; Michael AW; Yu KS, 2003, 'A Novel Bistable Themmally Actuated Snap-Through Acturator for Out of Plane Deflection', in Device and Process Technologies for MEMS, Microelectronics and Photonics III, Perth, WA, presented at Device and Process Technologies for MEMS, Microelectronics and Photonics III, Perth, WA, 10 December 2003 - 12 December 2003

Kwok CY; Michael AW; Yu KS, 2003, 'Theoretical Analysis of Initially Buckled, Thermally Actuated, and Snapping Bimorph Micro Bridge', in Device and Process Technologies for MEMS, Microelectronics and Photonics III, Perth, WA, presented at Device and Process Technologies for MEMS, Microelectronics and Photonics III, Perth, WA, 10 December 2003 - 12 December 2003

Conference Presentations

Michael AW; Wang P; Kwok CY, 2016, 'Highly efficient and Misalignment Tolerant Inversely Tapered Fiber-to-Silicon Wire Waveguide Coupler', presented at APCOT 2016, Kanazawa, Japan, 26 June 2016 - 29 June 2016

Michael AW, 2016, 'Design and Modelling of a novel micro-lens piezo-electric actuator for generation of fast and large movement', presented at APCOT2016, Kanazawa, Japan, 26 April 2016 - 29 April 2017

Michael AW, 2014, 'Characterization of In-situ doped thick polysilicon films deposited using ultra-high vacuum E-beam evaporation at low thermal budget', presented at 7th Asia-Pacific Conf. on Transducers and Micro/Nano Technologies(APCOT), Daegu, South Korea, 29 June 2014 - 02 July 2014

Kwok CY, 2014, 'Studies on a compact Si-Grating/micro-mirror/silica waveguide coupler', presented at APCOT 2014, 7th Asia-pacific Conference on Transducers and Micro/nano Technologies, Daegu, South Korea, 29 June 2014 - 02 July 2014

Patents

Kwok CY; Chen S-H; Michael A; Sengupta D, 2018, Advanced piezoelectric microlens actuator, Patent No. 2018903188, http://pericles.ipaustralia.gov.au/ols/auspat/applicationDetails.do?applicationNo=2018903188

Michael A; Chen S-H; Kwok CY, 2018, Process of fabricating lead zirconate titanate (PZT) based piezoelectric devices, Patent No. , http://pericles.ipaustralia.gov.au/ols/auspat/applicationDetails.do?applicationNo=2018903179

Chen SH; Michael A; Kwok CY, 2018, Piezoelectric Microlens Actuator, Patent No. 2018900447, http://pericles.ipaustralia.gov.au/ols/auspat/applicationDetails.do?applicationNo=2018900447

Preprints

Michael A; Chuang I, 2023, Low Thermal Budget Electrically Active Thick Polysilicon for Post CMOS MEMS-Last Integration, http://dx.doi.org/10.21203/rs.3.rs-3556585/v1

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